Jansen, Silicon Micromachining, Cambridge Univ. Frank, Understanding Smart Sensors, Artech House, Boston, 1995. Springer-Verlag, Berlin, 1997. Micromachining and Micropackaging of Transducers, Elsevier, Amsterdam, 1985. Gardner, Microsensors: Principles and Applications, Wiley, Chichester, 1994.
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